深(极)紫外光源

EUV Lamp DPP, standard

Xenon or air emission spectra

Xe: ≥ 2 W EUV

≥ 150 mW EUV inband

≥ 2000 h operation MTBF

24 / 7 operation

Xe: ≥ 8 W EUV

≥ 700 mW EUV inband

≥ 500 h operation MTBF

Burst (up to 1 hour) permanent operation

≥ 5 mW EUV emission

gold quasi-continuum spectra

< 50 μm source diameter

EUV-Irrad Source, Standard

Xe: ≥ 250 W EUV

≥ 20 W EUV inband

or N2 water window (2.4 -4.4 nm) emission

Few minute bursts of

Xe ≥ 500 W EUV

≥ 40 W EUV inband @ 13.5 nm

EUV-Brightness LPP (concept)

Source size down to 20 μm

Inband brightness ≥ 200 W/(mm² sr)

Top head high brightness profile