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Bench-top Modular Deposition Technology

  • Bench-top Modular PVD System
  • Bench-top Modular PVD System
  • Bench-top Modular PVD System
Bench-top Modular PVD SystemBench-top Modular PVD SystemBench-top Modular PVD System

Bench-top Modular PVD System

  • Modular design
  • Sputter, E-beam, Thermal
  • Small Footprint
  • Flexible
  • Product description: Modular PVD system
  • INQUIRY

Korvus HEX - Modular PVD system


Main features:

- Sputtering, E-beam Evaporating, Thermal Evaporating Compatible

- Modular design, changeable after installation

- Education and training

- Glovebox compatible


Main configuration and performance:

1.  Detachable chamber wall(functional, blank, Process gas line)

2.  Small footprint ~ 1m2 Size:65cm*60cm*70cm, weight: 50kg

3.  Pumping speed (5*10-6 Torr within 20 mins)

4.  4 inch substrate (rotation: 2-20rpm, Heating: 500℃, Water cooling, DC bias options)

5.  Multiple depsition technics: Sputter, E-beam, Thermal, Organic evaporation

6.  QCM, Glavebox and customized options.

7.  Automation control

8.  Load-lock option

9.  In-situ monitoring option


Model:

HEX

HEX-L

Max Substrate size 4 inch 6 inch
Turbo Pump

80 l/s

300 l/s
Pump upgrade 300 l/s 700 l/s
Number of side panel 6 6
Number of deposition source

3(plus QCM)

6
Compatible technology Sputter, Thermal, E-beam Sputter, Thermal, E-beam

Application:

Chemical Catalysis

Metal Electrode film

Magnetic film

Semiconductor film

Super thin film

Optical film

CONTACT US

Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356

Email: Info@be-instruments.com

Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing