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EUV OEM component

  • EUV source inband imaging Camera
EUV source inband imaging Camera

EUV source inband imaging Camera

  • Inband imaging
  • wavelength: 13.5 nm
  • Focal length: 250/500/1000 mm
  • Resolution: ~ 40 micron
  • Product description: EUV source inband imaging Camera

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.

EUV inband distribution CCD camera



Band width

Focal length

Operation pressure

13.5 nm

0.45 nm

250 mm(Nominal)

10-7 mbar



Max. Height


1000 mm

480 mm

450 mm

20 kg


DN 40 CF

Electronic connections

GigE / POE


Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356


Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing