EUV OEM component

EUV source inband imaging Camera

Inband imaging
wavelength: 13.5 nm
Focal length: 250/500/1000 mm
Resolution: ~ 40 micron
Product description: EUV source inband imaging Camera
INQUIRY

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.

EUV inband distribution CCD camera

Specifications:

wavelength Band width Focal length Operation pressure	13.5 nm 0.45 nm 250 mm(Nominal) 10^-7 mbar
Length Width Max. Height Weight	1000 mm 480 mm 450 mm 20 kg
Interface	DN 40 CF
Electronic connections	GigE / POE