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EUV OEM component

  • EUV focus distribution camera
EUV focus distribution camera

EUV focus distribution camera

  • wavelength range: 10~18/6~22 nm
  • Product description: EUV focus distribution camera
  • INQUIRY

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.


We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.


EUV Focus distribution camera


Specifications:

wavelength range

1~20 nm

Dimension

Weight

550 x 130 x 120 mm

36.5 kg

Interface

DN 40 CF

Compatibility

E-CAM


CONTACT US

Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356

Email: Info@be-instruments.com

Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing