Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).
RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.
We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.
EUV Energy Monitor
Specifications:
wavelength
Band width
Operation pressure
13.5 nm
0.45 nm
10-3 mbar
Dimension
Weight
300 x 105 x140
7 kg
Interface
DN 40 CF
Electronic Interface
2 BNC
Contact: Nana Zhang
Phone: 18201230727
Tel: 010-80698356
Email: Info@be-instruments.com
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing