Language: Chinese line English

EUV OEM component

  • EUV Source Spectrum Analyzer
  • EUV Source Spectrum Analyzer
EUV Source Spectrum AnalyzerEUV Source Spectrum Analyzer

EUV Source Spectrum Analyzer

  • wavelength range: 10~18/6~22 nm
  • Product description: EUV Source Spectrum Analyzer

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.

EUV Energy Monitor


wavelength range

Operation pressure

10~18/6~22 nm

10-6 mbar



700 x 280 x 310

36.5 kg


DN 40 CF

Electronic Interface


USB2 1x (connects to PC)

Lemo 1x (for shutter control)


Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356


Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing