EUV OEM component

EUV Source Spectrum Analyzer

wavelength range: 10~18/6~22 nm
Product description: EUV Source Spectrum Analyzer
INQUIRY

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.

EUV Energy Monitor

Specifications:

wavelength range

Operation pressure

10~18/6~22 nm

10^-6 mbar

Dimension

Weight

700 x 280 x 310

36.5 kg

Interface

DN 40 CF