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EUV turnkey system

  • EUV spectroscopy
  • EUV spectroscopy
  • EUV spectroscopy
EUV spectroscopyEUV spectroscopyEUV spectroscopy

EUV spectroscopy

  • Reflection/Transmission measurement
  • wavelength range: 8~40 nm
  • Spot size: 50 micron
  • Exposure time: 10 s
  • Product description: EUV spectroscopy
  • INQUIRY

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

EUV spectroscopy

Specifications:

wavelength range 8 ~ 40 nm
Spot size < 50 micron
Time to measure within 30 seconds
Precision 0.5 % / 10 pm
Accuracy 1 % / 20 pm


CONTACT US

Contact: Nana Zhang

Phone: 18201230727

Tel: 010-80698356

Email: Info@be-instruments.com

Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing