Compact MBE System-OCTOPLUS 300

The OCTOPLUS 300 system is a versatile and very thoroughly designed MBE system, ideally suited for material deposition on small samples. The  chamber design of the OCTOPLUS 300 plus various state-of-the-art components allow layer by layer precise MBE growth.

Product range and quality of Dr. Eberl MBE-Komponenten GmbH benefit from the many years of active research experience of its team members.

We now look back on over 25 years of developing and manufacturing of complex systems and components for multiple tasks in the applied research and production of compound semiconductor materials.

Each product is assembled and carefully tested in-house by our MBE experts.

Available specifications for the OCTOPLUS 300 system:

● applications for many materials like semiconductors, metals, oxides, organic materials etc.

● small samples or wafer sizes up to 2"

● additional load-lock or buffer chambers

● wafer transfer system

● standard 8 ports (more sources possible on request)

● effusion cells, valved or gas sources, manipulator

● pumping system (ion getter pumps, turbopumps, cryopumps etc.)

● in-situ characterization tools

● compatible to UHV surface analyzer

● sources: effusion cells, e-beam evaporators, etc.

We provide different kinds of effusion cells, valved cracker sources, gas sources and substrate manipulators according to all our customers' requirements. A well-manageable in-situ characterization is obtained by using beam-flux-gauges, RHEED systems or quadrupole mass analyzers (QMA).

Outstanding features of the OCTOPLUS 300 are the high reliability and versatility of the system and its small footprint. These features make our systems particularly suited for applications in research and development but specific production processes are also covered.

The standard version of the OCTOPLUS 300 comprises 8 source ports, two ports with 4.5 inch (DN63CF) and six ports with 2.75 inch (DN40CF) flange size. By using Source Clusters up to 10 sources can be integrated into the system. A rapidly pump-down load lock chamber with a horizontal working transfer rod system allows easy substrate introduction without breaking the vacuum of the MBE chamber.

We are happy to discuss your MBE system specifications and give competent advice for your application.

The OCTOPLUS 300 is in use in leading laboratories. On demand we transmit a detailed list of references. Please contact our sales department for further questions and specification information.

Don‘t hesitate to contact us if you have any requirements.