Ion Sources for Cleaning, Sputtering and Space Simulation
Standard sputtering ion sources
Scannable fine focus ion sources
Electron discharge ion sources
Duoplasmatron ion sources
Proton sources
ECR ion source
Standard Sputtering Ion Sources
Ion beam energy up to 5 keV
Argon ion cleaning with adjustable energy and broad beam spot
Computer source control
Scannable Fine Focus Ion Source for sputtering, depth profiling and ISS
Ion beam energy up to 5 keV
Multiple ion species
Focused ion beam with scanning for depth profiling
Computer scanning package
Optional differential pumping for UHV operation
Computer source control
High brightness ion beam
Mass separator optional
Non-line of sight operation available
Scannable Fine Focus Ion Source for sputtering, depth profiling and SIMS
Standard Energy up to 30 keV High intensity, high brightness fine focused ion beam
Multiple ion species
Differential pumping for UHV operation
Optional beam tilt for neutral rejection
Optional fine beam focus for scanning and microprobe operation
High brightness ion beam
Mass separator optional
Non-line of sight operation available
Proton Source for space research
Pure proton beam in an energy range up to 100 keV
Optional magnetic sector mass filtering
Adjustable beam size and homogeneity
Differential pumping for UHV operation
Compact, modular design to be mounted as add-on source to vacuum chambers
Large spot size
Contact: Nana Zhang
Phone: 18201230727
Tel: 010-80698356
Email: Info@be-instruments.com
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing