EUV mask and mask blank reflectometer

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

EUV mask and mask blank reflectometer

Specifications：