First Octoplus 300 in China was Successfully Installed

The First Octoplus 300 in China has been Successfully Installed and accepted in Nanjing University.

The OCTOPLUS 300 system is a versatile and very thoroughly designed MBE system, ideally suited for material deposition on small samples. The   chamber design of the OCTOPLUS 300 plus various state-of-the-art components allow layer by layer precise MBE growth.

● applications for many materials like semiconductors, metals, oxides, organic materials etc.

● small samples or wafer sizes up to 2"

● additional load-lock or buffer chambers

● wafer transfer system

● standard 8 ports (more sources possible on request)

● effusion cells, valved or gas sources, manipulator

● pumping system (ion getter pumps, turbopumps, cryopumps etc.)

● in-situ characterization tools

● compatible to UHV surface analyzer

● sources: effusion cells, e-beam evaporators, etc.