German Research Instruments is a high-tech company belonging to Bruker that focuses on deep ultraviolet and extreme ultraviolet light related technologies for laboratory use. It was founded in 2009. Our main equipment manufacturing experience is focused on ultra-high vacuum and ultra clean nano positioning systems, various types of deep (extreme) ultraviolet light sources, optical components, integrated analytical spectrometers, soft X-ray solutions, etc.
EUV spectrometer
Reflection/transmission testing
Spectral range: 8-40 nm
Spot diameter:<50 microns
Exposure time:<10 seconds
Technical parameters:
| wavelength range | 8 ~ 40 nm |
| Spot size | < 50 micron |
| Time to measure | within 30 seconds |
| Precision | 0.5 % / 10 pm |
| Accuracy | 1 % / 20 pm |
