electron gun

The energy range covers 10ev-125keV, and the beam spot diameter ranges from 20nm to 525mm,
Details


An electron gun is the electron injector of an accelerator, which emits an electron beam with a certain energy, current intensity, beam diameter, and emission angle into the accelerator tube. The function of an electron gun is to provide a satisfactory electron beam, which is typically used in Auger energy spectrometers (AES), energy loss spectrometers (ELS), and X-ray energy spectrometers (XPS)

We can provide various models of electronic sources, optimized for different application fields and analysis requirements. The energy range covers 10ev-125keV, and the beam spot diameter ranges from 20nm to 525mm, including various wide beam electronic sources, precision focused electronic sources, low-energy, and high-energy electronic sources, which can meet various purposes such as surface cleaning, surface sputtering, and space environment simulation.


Min. Spot SizeMax. EnergyModel Description
<85 nm15 keV» EF-15005
150 nm12 keV» EF-1201
250 nm12 keV» EF-1202
400 nm10 keV» EF-1005
2 µm8 keV» EM-802
3 µm5 keV» EM-503
6 µm5 keV» EM-506


‍Electronic flow source‍

Max. EnergyModel Description
100 eV» F01CC
5 keV» EMF-5
10 keV» EMF-10
20 keV» EHF-20
30 keV» EHF-30
40 keV» EHF-40
50 keV» EHF-50
60 keV» EHF-60
80 keV» EHF-80
100 keV» EHF-100


High beam energy electron source

Max. EnergyMax. Beam CurrentPowerModel Description
3 keV300 µA
» ES-380-HC
5 keV300 µA
» ES-550-HC
10 keV200 µA
» ES-1050-HC
20 keV0.5 mA / 1.0 mA10 W / 20 W» EH-20-10 / EH-20-20
30 keV1.0 mA / 3.3 mA30 W / 100 W» EH-30-30 / EH-30-100
40 keV0.5 mA / 1.0 mA20 W / 40 W» EH-40-20 / EH-40-40
50 keV0.5 mA / 1.0 mA25 W / 50 W» EH-50-25 / EH-50-50
60 keV0.5 mA / 1.0 mA30 W / 60 W» EH-60-30 / EH-60-60
80 keV0.5 mA / 1.0 mA40 W / 80 W» EH-80-40 / EH-80-80
100 keV0.5 mA / 1.0 mA50 W / 100 W» EH-100-50 / EH-100-100


High energy small focusing electron source

Max. EnergySpot Size
Model Description
20 keV<150 µm» EH-20
30 keV<150 µm» EH-30
40 keV<150 µm» EH-40
50 keV<150 µm» EH-50
60 keV<150 µm» EH-60
80 keV<150 µm» EH-80
100 keV<150 µm» EH-100
60 keV50 µm» GDS 60 (for GED applications)


Low energy electron source

Max. EnergyMax. Beam CurrentSpecial features
Model Description
100 eV100 µA
» NEK-150
100 eV100 µAscannable» NEK-150-SC
100 eV20 µAfor charge compensation» F01CC


RHEEDElectronic source

Max. EnergyModel Description
12 keV» RHEED-12
15 keV» RHEED-15
20 keV» RHEED-20
30 keV» RHEED-30
35 keV» RHEED-35
40 keV» RHEED-40
50 keV» RHEED-50
60 keV» RHEED-60


Phone:010-80698356  Email:Info@be-instruments.com    AD: Room 1208B, Block B, Building 1, Zhubang 2000 Business Center, No. 100, Balizhuangxili, Chaoyang District, Beijing

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