液氮低温杜瓦，冷屏罩，以及测温装置，确保了敏感样品能在原位低温下转移，因此，重量小便携式紧凑设计的真空存储腔才能方便样品的转移。样品在定制的便携式存储腔冷屏内可以避免来自于真空腔壁上的污染。可以方便的将样品转移至所需的特殊性能测试真空腔内。
特点：
Ultra compact UHV-chamber consist of:
- Flange list:
1x DN40CF-R transfer flange
1x DN40CF-WS for transfer manipulator
2x DN40CF-T for Viewport
1x DN40CF-WS for Pump: NEXTORR D100-5
1x DN50CF-T for Liquid Nitrogen Dewar
2x DN16CFT Service Ports
- Single Shaft Wobblestick Transporter DN40CF
- Tube Support for Wobblestick on VSN40S(HLVR|HRVL)
- Assembly of thermals shields for UHV suitcase including Liquid Nitrogen Dewar and Cooling Block
- Temperature Measurement Kit for UHV Suitcases with Thermal Shields
- VAT mini UHV gate valve, series 010, manual operation
- NexTorr D-100-5 combination pump
- LSA2.0 battery driven HV-supply
- Set of cables
- 2x viewports DN40CF, gaskets, bolt sets, sideplates, completely mounted
- Side/baseplates and 1x carrying handle
- Bakeout temperature: 150 deg C max.
- Fully UHV compatible materials
- Weight: approx. 12-14 kg, depending on configuration
- Ready for use: delivered under vacuum.
对接成套解决方案：
可对接的设备有：SEM/TEM, STM, FIB, XPS/AES, SIMS/APT, MBE/CVD/ALD, Synchrotron Beamline Endstation
TEM对接案例：
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