Quad Cluster Source-QCS

The use of Quad Cluster Source increases the capacity of your UHV System by using only a single port for up to four individual sources.

Possible applications are organic material deposition or other material evaporation up to about 1100°C.

Technical Data:

Mounting flange: DN40CF (O.D. 2.75") or DN63CF (O.D. 4.5")

Dimensions in vacuum: QCS 40 Length: standard 220 mm (180-400 mm on request); Diameter: 36 mm

QCS 63 Length: standard 220 mm (180-400 mm on request); Diameter: 45 mm

Distance source-sample: Typically 100 to 160 mm

Bakeout temperature: 250°C

Temperature sensor: Type K (Chromel/Alumel)

Outgassing temperature: 1100°C

Operating temperature: 25-1000°C

Typical power consumption: QCS 40 500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A

QCS 63 500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A

Crucible material: PBN, Quartz, Al₂O₃, etc.

Crucible nominal charge: QCS 40 1-12: 200 cc

QCS 63 1-14: 600 cc

Cooling: Water cooled block, 30 l/h cooling water flow, low temperature crosstalk

Shutters: integrated multi-position rotary shutter (S)