SH-O substrate manipulators are used in oxygen rich environments (up to several mbar) or reactive gas atmosphere.
Technical Data:
sample size up to 6"
continuous substrate rotation
water cooled ceramic bearings
linear travel for substrate transfer
thermocouple: Type K Chromel/Alumel (types R or S on request)
integrated main shutter
mask retainer
Contact: Nana Zhang
Phone: 18201230727
Tel: 010-80698356
Email: Info@be-instruments.com
Add: Room 1310, AirChina Plaza, No. 36 Xiaoyun Road, Chaoyang District, Beijing