EUV OEM component

EUV Source Diode Sensor

Spectral Filter included
Visible light blank
wavelength: 8-20 nm
suitable for soft x-ray, EUV XUV
Product description: EUV Source Diode Sensor
INQUIRY

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

We not only supply turnkey tools, but also supply EUV related OEM parts, such as, EUV inband distribution CCD camera, EUV spectra monitor, EUV focus unit, EUV energy monitor.

EUV Diode

Specifications：

wavelength range Nominal rise time Capacitance Operation pressure	8 ~ 20 nm 0.7 ns 40 pF 10^-3 mbar
Length Diameter Weight	53.3 mm CF 40: 70 mm < 500 g
Interface	DN 40 CF